主要技术参数与配置:
1.真空室容积:φ1100*1200mm
2.有效镀膜区:φ700*850mm
3.可移出式转架:无需定位,可任意位置移出,传动可靠(专利技术)
4.阴极电弧:φ160mm或φ140mm双驱动动态磁控阴极电弧*12
5.IET离子刻蚀源:1套
Configuration:
Ⅰ.Vacuum chamber volume:Φ1100mm*h1200mm
Ⅱ.Effective coating area:Φ700*850mm
Ⅲ.Carousel:Removable
Ⅳ.Φ160mm or Φ140mm dynamic magnetically controlled cathode arc*12
Ⅴ.IET *1技术特点:
该设备在PVD1012硬质涂层设备(8弧)的基础上进行升级,阴极电弧的数量升级为12个(3组)。可制备更多膜系。多种工艺选择,可满足用户的各种需求。PVD1112的设计让现场维护和保养十分方便,系统可以从两侧打开,所有系统部件都伸手可及。
Technical feature:
The equipment is upgraded on the basis of PVD1012 hard coating equipment (8 arcs), and the number of cathode arcs is upgraded to 12 (3 sets).More coating type are available. A variety of process options can meet the needs of users.The design of PVD1112 is very convenient for on-site maintenance. The system can be opened from both sides, and all the components of the system can be reached.